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. Author manuscript; available in PMC: 2022 Jun 20.
Published in final edited form as: Opt Lett. 2019 Aug 1;44(15):3645–3648. doi: 10.1364/OL.44.003645

Fig. 3.

Fig. 3.

Validation of the super-resolution capability of the PSM approach using (a) an amplitude and (b) a phase target. The incoherent summation of all captured images of (a1) the amplitude and (b1) the phase target. The raw PSM images of (a2) the amplitude and (b2) the phase target. The recovered super-resolution images of (a3) the amplitude and (b3) the phase target based on 864 raw images. In the recovered images, we can resolve the half-pitch linewidth of group 9, element 1, achieving ~4.5-fold resolution gain over the diffraction limit of the employed objective lens.