Figure 7.

Red curves: 2θ–ω scan XRD patterns of two 15 h Li₃PO₄-deposited LiCoO₂ thin films under a substrate bias potential of −0.5 V. Other deposition conditions were as follows: T_sub, 100 °C; RF power, 100 W; Ar, 20 sccm; O₂, 10 sccm; total pressure, 0.6 Pa; and target-substrate distance: 95 mm. XRD patterns before Li₃PO₄ deposition are also shown in blue curves; the LiCoO₂ thickness is given on the right top of each panel. Diffraction peaks marked by “*” in the bottom panel indicate the O1 phase 00l.