Table 1. Elemental Quantification of Pd, C, and O Obtained From Regions Indicated in Figure 3.

Ga+ dose [μC/cm2]	region	Pd [at. %]	C [at. %]	O [at. %]
8	1	45 ± 0.2	50 ± 4	5 ± 3
	2	46 ± 0.2	49 ± 4	5 ± 3
	3	46 ± 0.2	49 ± 4	6 ± 3
20	1	65 ± 0.2	28 ± 11	7 ± 3
	2	59 ± 0.2	36 ± 6	5 ± 3
	3	45 ± 0.2	50 ± 4	5 ± 3
60	1	53 ± 0.2	41 ± 5	6 ± 3
	2	52 ± 0.2	44 ± 4	4 ± 3
	3	48 ± 0.2	50 ± 4	2 ± 7