Figure 5.

Wafer TTV simulation results and their topographies of under the typical space angle conditions. (a) $\alpha$ = −0.006° and $\beta$ = 0°; (b) $\alpha$ = 0° and $\beta$ = −0.006°; (c) $\alpha$ = 0° and $\beta$ = 0.006°; (d) $\alpha$ = −0.006° and $\beta$ = −0.006°; (e) $\alpha$ = −0.006° and $\beta$ = 0.006°.