MEMS	Micro-Electro-Mechanical System
RF	Radio Frequency
PI	Polyimide
PDMS	Polydimethylsiloxane
PVD	Physical Vapor Deposition
CVD	Chemical Vapor Deposition
CMOS	Complementary Metal Oxide Semiconductor
SECT	Silicon-Embedded Coreless Transformer
DLM	Double-Layer Metal
PCB	Printed Circuit Board
NMR	Nuclear Magnetic Resonance
UV	Ultraviolet
PCL	Polycaprolactone