TABLE 1.
Data | AFM |
Optical profilometer |
Stylus profilometer |
AFM (HA deposition) |
||||
---|---|---|---|---|---|---|---|---|
Ra (nm) | Rq (nm) | Ra (nm) | Rq (nm) | Ra (nm) | Rq (nm) | Ra (nm) | Rq (nm) | |
Sample | ||||||||
As-fired Si3N4 | 241 | 305 | 309 | 399 | 140 | 180 | 438 | 555 |
Polished Si3N4 | 31 | 36 | 9 | 13 | 4 | 6 | 561 | 702 |
PEEK 600 grit | 295 | 357 | 496 | 619 | 122 | 155 | 405 | 508 |
PEEK 2000 grit | 144 | 172 | 164 | 206 | 52 | 64 | 458 | 523 |
Ti6Al4V600 grit | 135 | 166 | 140 | 183 | 38 | 53 | 226 | 300 |
Ti6Al4V2000 grit | 64 | 83 | 89 | 120 | 17 | 24 | 429 | 563 |