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. Author manuscript; available in PMC: 2022 Jul 1.
Published in final edited form as: Med Devices Sens. 2019 May 6;2(2):e10032. doi: 10.1002/mds3.10032

TABLE 1.

Summary of the AFM, optical profilometer and KLA Tencor roughness parameters; (Ra) roughness average and (Rq) the root-mean-square roughness of all samples

Data AFM
Optical profilometer
Stylus profilometer
AFM (HA deposition)
Ra (nm) Rq (nm) Ra (nm) Rq (nm) Ra (nm) Rq (nm) Ra (nm) Rq (nm)
Sample
 As-fired Si3N4 241 305 309 399 140 180 438 555
 Polished Si3N4 31 36 9 13 4 6 561 702
 PEEK 600 grit 295 357 496 619 122 155 405 508
 PEEK 2000 grit 144 172 164 206 52 64 458 523
 Ti6Al4V600 grit 135 166 140 183 38 53 226 300
 Ti6Al4V2000 grit 64 83 89 120 17 24 429 563