Table 1. GIXRR fit parameters of boron carbide/Cr as-deposited sample.
| Layer | Thickness (Å) | Roughness (Å) | δ |
|---|---|---|---|
| Surface layer | 26 | 11.0 | 6.110 × 10−6 |
| Boron carbide | 431 | 8.0 | 7.063 × 10−6 |
| Cr | 15.7 | 5.7 | 2.303 × 10−5 |
| SiO2 | 40.0 | 4.6 | 7.453 × 10−6 |
| Si substrate– | – | 5.0 | 7.577 × 10−6 |