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. 2022 May 25;29(Pt 4):978–984. doi: 10.1107/S1600577522004738

Table 2. GIXRR fit parameters of boron carbide/Cr after 550°C annealing.

Layer Thickness (Å) Roughness (Å) δ
Surface layer 21.6 11.0 5.410 × 10−6
Boron carbide 428.0 7.0 7.103 × 10−6
Cr 10.7 8.7 2.303 × 10−5
SiO2 30 7.5 7.253 × 10−6
Si substrate – 5.0 7.577 × 10−6