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| Pattern | Diameter (μm) | Area (μm2) | Spacing (μm) | Pattern area/total area (%) |
|---|---|---|---|---|
| LL | 12 | 113 | 36 | 9 |
| SS | 8 | 50 | 24 | 9 |
| SL | 8 | 50 | 36 | 4 |
Note:LL: large circles with large spacing; SL: small circles with large spacing; SS: small circles with small spacing.
