U11	U22	U33	U12	U13	U23
C1	0.0534 (11)	0.0579 (12)	0.0441 (10)	0.0127 (9)	−0.0106 (8)	−0.0169 (9)
C2	0.0654 (13)	0.0739 (14)	0.0491 (11)	0.0143 (11)	−0.0228 (10)	−0.0166 (10)
C3	0.0820 (14)	0.0654 (13)	0.0347 (10)	−0.0036 (11)	−0.0147 (10)	−0.0145 (9)
C4	0.0717 (13)	0.0660 (13)	0.0411 (10)	0.0070 (11)	0.0022 (9)	−0.0202 (9)
C5	0.0535 (11)	0.0597 (12)	0.0399 (10)	0.0105 (9)	−0.0032 (8)	−0.0137 (8)
C6	0.0405 (9)	0.0344 (9)	0.0346 (8)	−0.0042 (7)	−0.0035 (7)	−0.0071 (7)
C7	0.0388 (9)	0.0515 (11)	0.0352 (9)	0.0009 (8)	−0.0006 (7)	−0.0083 (7)
C8	0.0518 (10)	0.0495 (11)	0.0354 (9)	0.0016 (8)	0.0004 (8)	−0.0104 (8)
C9	0.0425 (10)	0.0619 (12)	0.0419 (10)	−0.0015 (8)	−0.0105 (8)	−0.0090 (8)
C10	0.0385 (9)	0.0569 (11)	0.0381 (9)	0.0049 (8)	−0.0053 (7)	−0.0113 (8)
C11	0.0484 (11)	0.0464 (11)	0.0508 (11)	0.0051 (8)	−0.0161 (9)	−0.0190 (9)
C12	0.0387 (9)	0.0356 (9)	0.0443 (9)	0.0023 (7)	−0.0086 (7)	−0.0131 (7)
C13	0.0366 (9)	0.0485 (11)	0.0617 (12)	−0.0058 (8)	−0.0057 (8)	−0.0157 (9)
C14	0.0437 (10)	0.0551 (12)	0.0500 (11)	−0.0060 (8)	0.0047 (8)	−0.0079 (9)
C15	0.0450 (10)	0.0485 (10)	0.0398 (9)	0.0020 (8)	−0.0042 (8)	−0.0110 (8)
C16	0.0461 (10)	0.0501 (11)	0.0430 (10)	−0.0103 (8)	−0.0101 (8)	−0.0112 (8)
C17	0.0447 (10)	0.0437 (10)	0.0400 (9)	−0.0072 (8)	−0.0036 (7)	−0.0075 (7)
C18	0.0785 (16)	0.136 (2)	0.0509 (13)	−0.0228 (16)	−0.0171 (11)	−0.0274 (14)
N1	0.0347 (7)	0.0416 (8)	0.0320 (7)	0.0006 (6)	−0.0034 (5)	−0.0091 (6)
N2	0.0553 (9)	0.0450 (8)	0.0319 (7)	−0.0061 (7)	−0.0089 (6)	−0.0082 (6)
O1	0.0815 (11)	0.1184 (15)	0.0727 (11)	−0.0352 (10)	−0.0327 (9)	−0.0230 (10)
O2	0.0721 (9)	0.0700 (10)	0.0402 (7)	−0.0038 (7)	−0.0139 (7)	−0.0144 (7)
O3	0.0641 (9)	0.0866 (11)	0.0365 (7)	−0.0067 (8)	−0.0047 (6)	−0.0117 (7)
OW1	0.0595 (9)	0.0631 (9)	0.0544 (8)	−0.0097 (7)	−0.0177 (7)	−0.0108 (7)