Table 6.
Binding energy of main elements in the film layers.
Element | Peak | Species/binding energy(eV) |
---|---|---|
Cr | 2p3/2 | Cr(met)/573.7 ± 0.2; Cr2O3/574.5 ± 0.3; Cr(OH)3/575.4 ± 0.1 |
Fe | 2p3/2 | Fe(met)/706.4 ± 0.2; Fe3O4/707.5 ± 0.2; FeO/709.5 ± 0.1 FeOOH/713.1 ± 0.3 |
Mo | 3d5/2 | Mo(met)/227.5 ± 0.3; Mo4+/228.9 ± 0.2; Mo6+/229.4 ± 0.3 |
3d3/2 | Mo(met)/230.4 ± 0.1; Mo4+/231.5 ± 0.2; Mo6+/232.8 ± 0.1 | |
Ni | 2p3/2 | Ni(met)/852.4 ± 0.2; NiO/854.1 ± 0.2 |
N | 1 s | N/399.6 ± 0.3 |
O | 1 s | O2−/529.7 ± 0.2, OH−/531.2 ± 0.2; H2O/531.8 ± 0.3 |