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. 2022 Jun 25;7(27):23497–23502. doi: 10.1021/acsomega.2c01890

Table 1. Growth Parameters of Epitaxial AlN Films.

sample N2 flow (SLM) Ar flow (SCCM) V/III ratio growth time (hour) growth temperature (°C) growth pressure (kPa)
S1 2 600 1473 3 1550 10
S2 2.5 700 1573 3 1550 10
S3 2 400 2210 3 1550 10
S4 2 200 4420 3 1550 10
S5 2.5 150 7367 3 1550 10