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. 2022 Jun 25;7(27):23497–23502. doi: 10.1021/acsomega.2c01890

Table 2. Position and fwhm of the E2 (high) Mode and Residual Stress in AlN Crystals.

sample E2 (high) (cm–1) fwhm (cm–1) residual stress (MPa)
S1 656.88 4.43 –141
S2 656.02 13.74 –373
S3 657.47 15.22 19
S4 656.47 70.60 19
S5 657.00 15.22 –108