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. 2022 Jun 14;122(13):11778–11829. doi: 10.1021/acs.chemrev.1c00971

Figure 3.

Figure 3

(a) Side view of compact CNx film. Adapted with permission from ref (94). Copyright 2019 Royal Society of Chemistry. (b) Cross-section SEM image of the CNx film. Adapted with permission from ref (95). Copyright 2018 John Wiley & Sons, Inc.