Table 1.

A summary of the traditional materials with applications in bioelectronics.³⁶

Materials	Properties	Device component	Applications
Silicon	Compatible with microfabrication	Substrate	Intraocular pressure and cardiovascular monitoring
Silicon	Compatible with microfabrication	Structural diaphragm	Blood pressure and shunt pressure sensor
Silicon oxide	High-quality factor	Structural diaphragm and substrate	Surface acoustic wave blood pressure sensor
Silicon nitride	Thermally stable	Dielectric layer	Orthopedic sensor
Silicon nitride	Thermally stable	Insulation layer	Cerebrospinal fluid flow monitoring
Stainless steel	Compatible with stents	Substrate	Capacitive pressure sensor