Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Illustration of the MEMS vibrometer microfabrication: (a) HF cavity etching into borofloat wafer; (b) through-glass vias by fs-laser ablation; (c) local boron-doping of the SOI device layer; (d) anodic bonding of SOI and borofloat wafers; (e) metallization by Cr+Au magnetron sputtering and successive Cu electroplating; (f) removing handle layer by KOH etching; (g) fs-laser cutting cantilever into membrane; (h) encapsulation by anodically bonding a glass lid.
