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. 2022 Jul 19;22(14):5368. doi: 10.3390/s22145368

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© 2022 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

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(a) Frequency response of the MEMS vibrometer chip as obtained by the setup shown in Figure 6. Bending (b1, b2) and torsional modes (t1) are indicated. (b) Velocity amplitude as obtained by the LDV measurement.