| A | Arc current/A |
| B | Bias voltage/V |
| C | N2 flow rate/sccm |
| SEM | Scanning Electron Microscopy |
| EDS | Energy-Dispersive Spectrometry |
| Ra | Roughness parameters |
| A | Arc current/A |
| B | Bias voltage/V |
| C | N2 flow rate/sccm |
| SEM | Scanning Electron Microscopy |
| EDS | Energy-Dispersive Spectrometry |
| Ra | Roughness parameters |