ANFF | Australian National Fabrication Facility |
CMOS | complementary metal-oxide semiconductor |
EBL | electron beam lithography |
FOM | figure of merit |
GMR | guided mode resonance |
MSE | mean-squared error |
NIR | near infrared |
PECVD | plasma-enhanced chemical vapor deposition |
PML | perfectly matched layers |
SE | spectroscopic ellipsometry |
SEM | scanning electron microscopy |
TE | transverse electric |
TM | transverse magnetic |
WVASE | Woollam variable-angle spectroscopic ellipsometry |