Figure 10.
Alignment marks in OIR. SEM images at 5 keV showing Al alignment marks on silicon substrates, (a) before and (b) after condensing 80-nm-thin nonane ice film. Reprinted with permission from [96]. Copyright 2018, Elsevier.
Alignment marks in OIR. SEM images at 5 keV showing Al alignment marks on silicon substrates, (a) before and (b) after condensing 80-nm-thin nonane ice film. Reprinted with permission from [96]. Copyright 2018, Elsevier.