Figure 3.
Plot of a force–bending characteristic: (a) Survey over the measuring sequence with 2 µm steps (stop points at a small force and at the maximum force); (b) Determination of the stiffness c = F/z with linear trendlines. The specification of the cantilever 100-2 is given in Section 3.1; (1_41_5) means the 5th single measurement).