Table 4.

Young’s modulus E calculated from the dimensions h, b and the measured stiffnesses c using the difference method (E<100> = 130 GPa is the nominal value).

Nominal Thickness h = 45 µm			Nominal Thickness h = 70 µm			Nominal Thickness h = 100 µm			Nominal Thickness h = 200 µm
Chip	Δx µm	E GPa	Chip	Δx µm	E GPa	Chip	Δx µm	E GPa	Chip	Δx µm	E GPa
45-2	1000	134	70-1	1000	132	100-1	1000	128	200-3	1000	132
	2000	127		2000	132		2000	130		1000	128
	1000	135		1000	132		1000	131		1000	129