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. 2022 Aug 19;22(16):6253. doi: 10.3390/s22166253

Table 7.

The determination of the stylus force from the stiffness and the zero-load bending, as shown in Equation (6). The error of c is the standard deviation, the estimation of errors of zE and z0E is described in Section 4.2.1.

Cantilever c/N/m zE/µm z0E/µm zE − z0E/µm F/µN
45-1 14.72 −13.436 0.938 −14.373 −211.6
±0.05 ±0.110 ±0.017 ±0.128 ±2.6
±0.33% ±0.89% ±1.22%
70-4 61.47 −2.931 0.502 −3.433 211.0
±0.21 ±0.014 ±0.018 ±0.032 ±2.7
±0.35% ±0.41% ±1.28%