Table 10.

The budgets of the uncertainty of z_E and z_E0 of the cantilevers 45-1 and 70-4.

		${\mathit{z}}_{\mathit{t}\mathit{a}\mathit{c}};{\mathit{z}}_{\mathit{A}\mathit{F}}$ µm	$\mathit{\delta }{\mathit{S}}_{\mathit{R}\mathit{O}\mathit{L}}$ µm/µm	L µm	$\mathit{\delta }{\mathit{z}}_{\mathit{z}\mathit{e}\mathit{r}\mathit{o}}$ µm	$\mathit{\delta }{\mathit{z}}_{\mathit{R}\mathit{O}\mathit{L}}$ µm	${\left(\frac{\mathbf{\Delta }\mathit{z}}{\mathbf{\Delta }\mathit{x}}\right)}_{\mathit{E}}$ µm/µm	δx µm	$\mathit{\delta }{\mathit{z}}_{\mathit{l}\mathit{a}\mathit{t}}$ µm	$\mathit{\delta }{\mathit{z}}_{\mathit{E}};\mathit{\delta }{\mathit{z}}_{0\mathit{E}}$ µm
45-1	tactile	0.001	1.64 × 10−7	12075	0.0026	0.0046	−0.0092	12	−0.1102	0.1103
	zero load	0.01	6.54 × 10−7	8860	0.0075	0.0133	0.0004	12	0.0049	0.0173
70-4	tactile	0.001	2.13 × 10−7	12085	0.0032	0.0058	−0.0011	12	−0.0132	0.0144
	zero load	0.01	6.29 × 10−7	9050	0.0087	0.0144	0.0002	12	0.0021	0.0177