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. 2022 Jul 28;13(8):1201. doi: 10.3390/mi13081201
t Thickness of structural layer
mb Mass of the drive frame
mp1 Mass of the decoupling frame
mp2 Mass of the sense frame
mp3 Mass of the sense-II (Connecting lever input)
mp4 Mass of the sense-II (Connecting lever output)
Ncomb Number of comb fingers in drive direction,
Ncap Number of comb fingers in sense direction
Icomb Overlapping length of driving comb fingers
Icap Overlapping length of sensing comb fingers
ycomb Gap between the comb fingers in drive direction
ycap Gap between the comb fingers in sense direction
F0 Amplitude of the exciting force
cb Damping coefficient in drive direction
cy1 Damping coefficient of mp1 and mp2
cy2 Damping coefficient of mp3
cy3 Damping coefficient of mp4
B Leverage rate (LR)
ϵ1 Frequency coupling parameter (FCP)
ϵep Extreme point of the Coriolis peak at the lever output of sense-II
μ1 Mass ratio
kb stiffness of beam in drive direction
kd Nonlinear stiffness of beam in drive direction
Ax The amplitude of the drive mode
φωξ The phase of the drive mode
ωx The resonant frequency of the drive mode
ξx The damping ratios of the drive mode
ωA,ωB,ωC The structural frequency of the sense system
P1,2 The resonant frequency of the sense mode
Δ The peak spacing
ωR The parametric frequencies
kY1,kY2,kY3 The stiffness of the beam in the sense direction
Ωz Input angular velocity
y1,y2,y3 The displacements of masses mp2, mp3, and mp4