Fig. 1. (a) 3D schematic of the BTO–Fe film, buffer layer, and Si substrate stack and (b) lattice/domain match between the TiN and STO buffers and Si substrate. (c) θ–2θ XRD patterns of BTO–Fe thin films grown on various buffers, with a (d) local scan centered around the BTO (002) peak to distinguish the different phases and orientations.