Fig. 2. Scanning electron micrographs (SEM) of CNT-M microcantilevers. (a) a microcantilever extending from a larger base with the entire device resting on a silicon substrate, (b) microcantilever top surface, and (c) microcantilever side wall. (d) an SEM image of a CNT-M microcantilever that was cross sectioned by focused ion beam (FIB) prior to imaging. The samples in (a), (b), and (d) were infiltrated for 2 minutes, and (c) for 4 minutes.