Fig. 4. Resonance frequency and quality factor at various pressures. (a) Resonance data of a single cantilever (with dimensions of 4.3 mm long, 1 mm wide, ∼200 microns thick, and infiltrated for 10 min) in three partial air environmental pressures. Each data set is fit to a Lorentzian model shown alongside a model fitted to each case that was used to extract the resonance frequency and quality factor. (b) The value of the damping ratio (ζ = 1/(2Q)) for a given cantilever is shown for a range of environmental gas pressures. It can be seen that at atmospheric pressure approximately half of the total damping is due to fluid damping, the other half being due to clamping and other losses.