Fig. 5. Resonant frequency of a cantilever is shown for relative humidity values of 0, 34, and 100 percent (cantilever dimensions are: 3 mm long, 100 μm wide, 64 μm high, and a carbon infiltration time of 6 minutes). This histogram shows observations taken while humidity values were sequentially changed in a randomized order. Shifts on the order of 1 Hz were seen on top of a base resonant frequency of 1.65 kHz.