Peak shift and FWHM of the (0002) peak of the Ga-doped MgZnO films.

X Ga	0	0.014	0.027	0.041	0.062	0.066	0.076
2θ (°) of the (0002) peak	34.55	34.57	34.62	34.60	34.55	34.37	34.38
d (Å)	2.595	2.594	2.590	2.592	2.595	2.609	2.608
FWHM (2θ°)	0.364	0.323	0.299	0.301	0.318	0.390	0.418