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. 2022 Aug 29;13:5076. doi: 10.1038/s41467-022-32827-7

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© The Author(s) 2022

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Illustration of human body and anatomical structure of finger. b Finger-inspired rigid-soft hybrid piezoelectric tactile sensor array. c Differences of piezoelectric film deformation and working mode between our tactile sensor and existing piezoelectric tactile sensors. The blue color indicates the stress distribution of piezoelectric film. d Photograph of a 3 × 3 fabricated RSHTS array. e Comparison of the sensitivity of our tactile sensor with existing piezoelectric tactile sensors.