Table 1. Summary of the SRX’s nano-KB mirror parameters.
Energy-dependent parameters such as the transverse coherence length and diffraction-limited focus size are evaluated at 10 keV. Under routine operation conditions, the horizontal source size, defined by the secondary source aperture, ranges from 100 to 10 µm. In the vertical direction, the KB mirrors operate on the primary X-ray source from the IVU-22 undulator. Except for the slope errors, all relevant parameters are based on FWHM values. The value in the slope error contribution column indicates the broadening of the focus size due to the slope errors.
| Direction | Source size (µm) | p (m) | q (mm) | Active length (mm) | θ (mrad) | KB aperture (µm) | NA | Transverse coherence length (µm) | Slope errors(nrad) | Diffrac.-limited focus (nm) | Demag. focus (nm) | Slope error contribution (nm) | Final designed focus (nm) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Horizontal | 10 | 15.16 | 130 | 110 | 3 | 330 | 1.27×10−3 | 94 | 50 | 49 | 86 | 30 | 103 |
| Vertical | 17.6 | 65.63 | 310 | 210 | 3 | 630 | 1.02×10−3 | 231 | 70 | 61 | 83 | 101 | 144 |