Table 2. Summary of motion actuators used in the KB-mirror assembly.
| Motion | Actuator | Range | Resolution |
|---|---|---|---|
| Vertical mirror, Y | Stepper motor | ±5 mm | 0.5 µm (full step) |
| VM pitch (coarse) | PI Nexline N-111 | −0.5 to 4.5 mrad | ∼220 nrad |
| VM pitch (fine) | PI P-841 piezo | ±0.67 mrad | <50 nrad |
| Vertical mirror, Z | Manual | ±5 mm | 50 µm |
| Horizontal mirror, X | Stepper motor | ±5 mm | 1.0 µm (full step) |
| HM pitch (coarse) | PI Nexline N-111 | −0.5 to 4.5 mrad | ∼220 nrad |
| HM pitch (fine) | PI P-841 piezo | ±1.5 mrad | <50 nrad |