Table 3. Summary of all motions of the sample stage.

Motion	Actuator		Range	Resolution
Coarse X, Z	SmarAct		100/120 mm	1 nm
Coarse Y	SmarAct		±7.5 mm	1 nm
Fine X, Y, Z	nPoint NPXYZ100		100 µm	1 nm
Rotation	SmarAct		Infinite	∼260 nrad
Sample centering, X, Z	SmarAct		±3.5 mm	1 nm
User-available electrical connections for in situ experiments		4
Maximum sample weight		0.5 kg