U11	U22	U33	U12	U13	U23
C2	0.0604 (14)	0.0435 (12)	0.0537 (13)	0.0027 (10)	0.0411 (12)	−0.0021 (10)
C4	0.0850 (19)	0.0550 (15)	0.0668 (16)	0.0109 (13)	0.0563 (16)	0.0013 (12)
C5	0.109 (2)	0.0657 (17)	0.0641 (17)	0.0001 (17)	0.0640 (18)	0.0001 (14)
C6	0.087 (2)	0.0733 (18)	0.0555 (15)	0.0049 (16)	0.0420 (16)	0.0142 (14)
C7	0.0703 (17)	0.0651 (17)	0.0705 (17)	0.0194 (14)	0.0436 (15)	0.0185 (14)
C8	0.0577 (14)	0.0464 (12)	0.0551 (14)	0.0060 (11)	0.0388 (12)	0.0017 (11)
C9	0.0580 (13)	0.0411 (11)	0.0484 (12)	0.0015 (10)	0.0358 (11)	−0.0010 (10)
C12	0.0421 (11)	0.0541 (13)	0.0449 (12)	−0.0005 (10)	0.0266 (11)	−0.0062 (11)
C14	0.086 (2)	0.087 (2)	0.0555 (16)	0.0163 (16)	0.0498 (16)	−0.0027 (14)
C15	0.107 (3)	0.085 (2)	0.0498 (15)	0.0272 (19)	0.0461 (17)	0.0063 (14)
C16	0.090 (2)	0.0757 (19)	0.0485 (15)	0.0291 (17)	0.0315 (15)	−0.0001 (14)
C17	0.0615 (15)	0.0649 (16)	0.0475 (14)	0.0171 (13)	0.0277 (12)	−0.0065 (12)
C18	0.0467 (12)	0.0520 (13)	0.0425 (12)	0.0014 (10)	0.0261 (11)	−0.0085 (10)
C19	0.0542 (14)	0.0561 (14)	0.0480 (13)	0.0051 (11)	0.0322 (12)	−0.0054 (11)
N1	0.0716 (14)	0.0522 (12)	0.0658 (13)	0.0182 (11)	0.0527 (12)	0.0089 (10)
N3	0.0555 (11)	0.0470 (10)	0.0480 (11)	0.0102 (9)	0.0356 (10)	0.0018 (9)
N10	0.0807 (16)	0.0608 (13)	0.0583 (13)	0.0140 (11)	0.0525 (13)	0.0042 (10)
N11	0.0440 (10)	0.0592 (12)	0.0450 (10)	0.0050 (9)	0.0296 (9)	−0.0045 (9)
N13	0.0522 (12)	0.0660 (13)	0.0499 (11)	0.0139 (10)	0.0345 (10)	−0.0004 (10)
N20	0.0551 (12)	0.0685 (14)	0.0502 (12)	0.0098 (11)	0.0318 (11)	0.0020 (11)
O22	0.0481 (9)	0.0669 (10)	0.0421 (8)	0.0040 (7)	0.0302 (8)	0.0120 (7)
O23	0.0752 (12)	0.0507 (9)	0.0791 (12)	−0.0031 (8)	0.0624 (11)	−0.0046 (8)
O24	0.0619 (11)	0.1028 (15)	0.0410 (9)	−0.0251 (11)	0.0223 (9)	0.0111 (9)
O25	0.0948 (14)	0.0562 (10)	0.0907 (13)	0.0093 (9)	0.0796 (12)	0.0092 (9)
O26	0.144 (2)	0.148 (3)	0.0652 (14)	−0.069 (2)	0.0725 (17)	−0.0286 (16)
S21	0.0483 (3)	0.0508 (3)	0.0396 (3)	−0.0046 (3)	0.0317 (3)	0.0008 (2)