U11	U22	U33	U12	U13	U23
C1	0.0187 (4)	0.0277 (4)	0.0242 (4)	−0.0014 (3)	−0.0009 (3)	0.0018 (3)
C2	0.0207 (4)	0.0263 (4)	0.0202 (4)	0.0008 (3)	−0.0024 (3)	0.0030 (3)
C3	0.0179 (3)	0.0208 (4)	0.0163 (3)	0.0012 (3)	0.0019 (3)	0.0019 (3)
C4	0.0218 (4)	0.0268 (4)	0.0244 (4)	−0.0017 (3)	0.0057 (3)	0.0059 (3)
C5	0.0206 (4)	0.0326 (5)	0.0214 (4)	−0.0007 (3)	−0.0025 (3)	0.0057 (3)
C6	0.0217 (4)	0.0257 (4)	0.0285 (4)	−0.0007 (3)	−0.0032 (3)	−0.0017 (3)
C7	0.0176 (4)	0.0236 (4)	0.0338 (5)	−0.0029 (3)	0.0020 (3)	−0.0033 (3)
C8	0.0182 (3)	0.0197 (3)	0.0183 (3)	−0.0019 (3)	0.0032 (3)	−0.0005 (3)
C9	0.0367 (5)	0.0263 (4)	0.0240 (4)	−0.0061 (4)	0.0108 (4)	0.0020 (3)
C10	0.0209 (4)	0.0326 (5)	0.0237 (4)	−0.0051 (3)	−0.0017 (3)	0.0037 (3)
C11	0.0138 (3)	0.0151 (3)	0.0160 (3)	−0.0013 (2)	−0.0009 (2)	0.0004 (2)
C12	0.0195 (3)	0.0185 (3)	0.0174 (3)	−0.0033 (3)	0.0012 (3)	0.0012 (3)
C13	0.0264 (4)	0.0195 (4)	0.0271 (4)	−0.0066 (3)	−0.0035 (3)	0.0064 (3)
C14	0.0310 (5)	0.0154 (4)	0.0388 (5)	0.0007 (3)	−0.0104 (4)	−0.0017 (3)
C15	0.0254 (4)	0.0259 (4)	0.0320 (5)	0.0068 (3)	−0.0036 (3)	−0.0108 (4)
C16	0.0171 (3)	0.0271 (4)	0.0203 (4)	0.0017 (3)	0.0017 (3)	−0.0031 (3)
N1	0.0185 (3)	0.0238 (3)	0.0208 (3)	−0.0010 (3)	0.0027 (2)	0.0026 (3)
N2	0.0179 (3)	0.0203 (3)	0.0174 (3)	0.0002 (2)	0.0017 (2)	0.0026 (2)
N3	0.0206 (3)	0.0230 (3)	0.0199 (3)	−0.0013 (3)	0.0008 (2)	0.0010 (3)
N4	0.0199 (3)	0.0193 (3)	0.0219 (3)	−0.0027 (2)	0.0051 (2)	−0.0011 (3)
O1	0.0321 (4)	0.0167 (3)	0.0868 (7)	−0.0008 (3)	0.0267 (5)	−0.0041 (4)
O2	0.0559 (5)	0.0311 (4)	0.0288 (4)	−0.0159 (4)	0.0089 (4)	0.0088 (3)
O3	0.0445 (5)	0.0265 (4)	0.0438 (5)	−0.0125 (3)	−0.0235 (4)	0.0020 (3)
S1	0.01652 (9)	0.01532 (9)	0.02171 (10)	−0.00380 (6)	0.00082 (7)	0.00194 (6)