U11	U22	U33	U12	U13	U23
Cl1	0.02835 (16)	0.02741 (16)	0.01490 (15)	−0.00009 (11)	0.00920 (12)	−0.00131 (11)
Cl2	0.03392 (18)	0.02289 (16)	0.01804 (15)	−0.00098 (12)	0.00730 (12)	0.00740 (11)
O1	0.0505 (6)	0.0152 (4)	0.0266 (5)	0.0004 (4)	0.0124 (4)	0.0022 (3)
O2	0.0281 (4)	0.0181 (4)	0.0175 (4)	−0.0002 (3)	0.0066 (3)	0.0052 (3)
O3	0.0253 (5)	0.0269 (4)	0.0174 (4)	−0.0058 (3)	0.0021 (3)	0.0010 (3)
O4	0.0235 (4)	0.0248 (4)	0.0136 (4)	0.0029 (3)	0.0056 (3)	−0.0005 (3)
C1	0.0142 (5)	0.0158 (5)	0.0169 (5)	0.0010 (4)	0.0045 (4)	0.0026 (4)
C2	0.0152 (5)	0.0161 (5)	0.0188 (5)	0.0008 (4)	0.0056 (4)	−0.0004 (4)
C3	0.0156 (5)	0.0217 (5)	0.0139 (5)	0.0011 (4)	0.0052 (4)	0.0000 (4)
C4	0.0183 (5)	0.0196 (5)	0.0164 (5)	0.0003 (4)	0.0049 (4)	0.0050 (4)
C5	0.0216 (5)	0.0155 (5)	0.0171 (5)	−0.0003 (4)	0.0048 (4)	0.0019 (4)
C6	0.0155 (5)	0.0165 (5)	0.0143 (5)	0.0002 (4)	0.0034 (4)	0.0011 (4)
C7	0.0168 (5)	0.0167 (5)	0.0204 (5)	0.0019 (4)	0.0059 (4)	0.0036 (4)
C8	0.0292 (6)	0.0237 (6)	0.0243 (6)	0.0038 (5)	0.0098 (5)	0.0115 (5)
C9	0.0242 (6)	0.0125 (5)	0.0150 (5)	0.0009 (4)	0.0049 (4)	0.0030 (4)
C10	0.0342 (7)	0.0261 (6)	0.0147 (5)	0.0029 (5)	0.0097 (5)	−0.0001 (4)