FIGURE 2.

Schematic illustration of the interaction between the incident electrons and the atoms of specimen. (A) Schematic diagram of the described electron beam interacting with an atom in the sample, including the nucleus and electron cloud/shells. AE stands for Auger electron; BSE, for backscattered electron; SE, for secondary electron; and EELS, for electron energy-loss spectra. (B) Schematic diagram of the described scattering pathway of an incident electron within the sample. (C) Classification of radiation damage induced by electron beam.