Table 1.
Comparison of the electrical performance with WSe2 p‐FETs enabled by various contact strategies
| Processing strategies | Polarity | Contact resistance [kΩ∙µm] | Hole mobility [cm2 V−1 s−1] | Saturation current [µA µm−1] | ON/OFF ratio |
|---|---|---|---|---|---|
| This work | p‐type | 4 | 108 (RT) | −280 (V DS = −5 V, V GS = −8 V) | 109 |
| Transferred via contact[ 47 ] | p‐type | 3.5 | 195 (RT) | −200 (V DS = −1.5 V, V GS = −100 V) | 106 |
| Pt pre patterning[ 48 ] | p‐type | 100 | 140 (RT) | −6 (V DS = −5 V, V GS = −5 V) | 106 |
| Au doping + ion gel[ 49 ] | p‐type | NA | 100 (RT) | NA | 106 |
| NO2 absorption[ 50 ] | p‐type | NA | 250 (RT) | −10 (V DS = −1.5 V, V GS = −1.7 V) | >106 |
| Polymer electrolyte[ 51 ] | p‐type | 10 | 180 (RT) | NA | NA |
| 2D/2D contact (NbWSe2)[ 52 ] | p‐type | 0.3 | 220 (RT) | −320 (V DS = −1.5 V, V GS = −130 V) | 109 |
| Gr electrodes + ionic liquid[ 53 ] | p‐type | 2 | 200 (160 K) | −180 (V DS = −5 V, V GS = −100 V) | 107 |
| 1 L WO x + 3L WSe2 [ 17 ] | p‐type | 66 | 50 (RT) | NA | 107 |
| XeF2 thinning[ 54 ] | p‐type | >1000 | 0.35 (RT) | NA | 104 |
| Al2O3/CYTOP fluoropolymer[ 55 ] | p‐type | NA | 100 (RT) | NA | 107 |
| Van der Waals contact[ 30 ] | p‐type | 14 | 16 (RT) | NA | 107 |
| 3 L WO x + 5L WSe2 [ 23 ] | p‐type | 0.5 | NA | −320 (V DS = −1 V) | <10 |
| Rapid flame synthesis MoO3 [ 56 ] | p‐type | 0.8 | NA | 1000 (V DS = 5 V, V GS = −15V | <10 |
| NO absorption[ 57 ] | p‐type | 0.95 | NA | −300 (V DS = −1 V) | >106 |
“NA” indicates “not available in the paper”.