Table 1.
Film | Carrier | Deposition Conditions | Time (h) * | Samples | |||||
---|---|---|---|---|---|---|---|---|---|
Precursor | Sample Mass (mg) |
Temperature (°C) | Gas Flow Gas (L/h) | ||||||
Evaporator (p Prec.., Torr [25]) |
Deposition | Carrier (Ar) |
Reagent (O2) |
||||||
Ir | CCM | Ir(acac)(CO)2 | 60 | 70 (0.02) | 280 | 2 | 2 | 2 | Ir/CCM |
CFR-PEEK | 80 | 83 (0.07) | 320 | 4 | Ir/CFR-PEEK | ||||
60 | 2 | Ir/CFR-PEEK-2 | |||||||
200 | 8 | Ir/CFR-PEEK-8 | |||||||
300 | 12 | Ir/CFR-PEEK-12 | |||||||
Pt | CCM | (CH3)3Pt(acac)Py | 80 | 70 (0.06) | 280 | 2 | 1 | 2 | Pt/CCM |
CFR-PEEK | 100 | 115 (0.15) | 320 | 4 | Pt/CFR-PEEK | ||||
80 | 2 | Pt/CFR-PEEK-2 | |||||||
200 | 6 | Pt/CFR-PEEK-6 | |||||||
350 | 12 | Pt/CFR-PEEK-12 | |||||||
PtIr | CFR-PEEK | (CH3)3Pt(acac)Pyand Ir(acac)(CO)2 | 65 and 65 | 105 and 80 (0.06 and 0.06) | 310 | 2 | 1.5 | 2 | PtIr/CFR-PEEK |
130 and 130 | 4 | PtIr/CFR-PEEK-4 |
* The deposition time is indicated for one side of the disc. For biological research, the samples were covered on both sides.