Table 1.
The main parameters of Mirror I-1.
| Index | Design I Parameter | Mirror I-1 | Units |
|---|---|---|---|
| 1 | mirror diameter | 5 | mm |
| 2 | spring notch length | 400 | μm |
| 3 | spring width | 100 | μm |
| 4 | cantilever width | 850 | μm |
| 5 | cantilever root length | 400 | μm |
| chip size | 10 × 10 | mm × mm | |
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