Table 2.

The main parameters of Mirror II-1 and Mirror II-2.

Index	Design II Parameter	Mirror II-1	Mirror II-2	Units
6	mirror diameter	3	1.5	mm
7	frame anchor width	280	140	μm
8	hinge width	180	90	μm
9	slow axis anchor width	540	270	μm
10	slow axis width	1.22	0.61	mm
11	slow axis length	3.16	1.58	mm
12	spring width	60	30	μm
13	cantilever width	680	340	μm
14	frame size	3.17 × 2.94	1.54 × 1.47	mm× mm
chip size		10.8 × 8.6	5.4 × 4.3	mm× mm