Fig. 19.

Typical drift experienced by the miEye. A-B) Calibration of the IR beam displacement from pixels into nm. Typical drift C) and D) in X (gray), Y (red), and Z (green) as experienced by the miEye. C) without, and D) with an active drift-suppressions system. Raw signals are represented in lighter colors, and filtered using 5-point box smoothing are represented by a darker color. (For interpretation of the references to color in this figure legend, the reader is referred to the web version of this article.)