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. 2022 Oct 13;13:6048. doi: 10.1038/s41467-022-33877-7

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© The Author(s) 2022

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 3 — a The photo of the connected three-layer networks. b The packaged single layer within one chip. c The false-color image of MZI mesh and AONUs. Black, Si waveguide. Green, electrodes of thermally-tunable MZI. d The detailed AONUs of a single layer. The structure of each AONU has been shown in Fig. 2d.