Characterization of the
multimodal sensing device for cardiac organoid
detection. (a) Schematic layouts of the multimodal sensor that is
composed of an active-matrix pressure-sensitive transistor array with
integrated soft liquid-metal electrodes. (b) Optical micrograph of
the two adjacent transistors. S and D denote the source electrode
and drain electrode, respectively. Scale bar, 20 μm. (c) Optical
micrograph after the gate electrode (denoted as G) assembly. Scale
bar, 50 μm. (d) Representative transfer characteristics of Si
FET (VD = 5 V) of the device at ambient
conditions. (e) Output characteristic of an air-dielectric FET (VG = 0 to 40 V, 10 V step) at ambient conditions.
(f) Real-time measurements of normalized ID changes for the applied compressive pressures during electrical
stimulation at different electrical fields (VG = 20 V, VD = 5 V). (g) Plot of
the relative changes in ID versus applied
compressive pressure to define pressure sensitivity (denoted as S).
Error bars indicate the standard deviations. (h) Plot of the pressure
sensitivity versus the different magnitudes of the electric field.
(i) Impedance of the 3D EGaIn electrode (height, 250 μm; diameter,
60 μm; red line) and flat electrode (black line) over the frequency
range from 10 Hz to 10 MHz. (j) Cyclic voltammetry plot of 3D EGaIn
electrode (height, 250 μm; diameter, 60 μm; red line)
and flat electrode (black line) over a range from −0.6 to 0.8
V at a sweep rate of 50 mV s–1.