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(a) XPS survey spectrum of gas-phase fluorination LiF coated LLZTO. (b) Detailed Li1s and F1s spectra of gas-phase fluorination LiF coated LLZTO. (c) XPS survey spectrum of gas-phase fluorination LiF coated LLZTO after 24 h in ambient air. (d) Comparison of the detailed XPS C1s emission lines of an uncoated LLZTO (red), sputter-coated LLZTO (blue), and gas-phase fluorinated LLZTO (black) after air exposure.
