Figure 3.
Cross-sectional images of the alignment airgap dielectric layer. (a–c) pore size: 300 μm, distance: 1 mm, 1.5 mm, 2 mm. (d–f) pore size: 400 μm, distance: 1 mm, 1.5 mm, 2 mm. (g–i) pore size 500 μm, distance: 1 mm, 1.5 mm, 2 mm.
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