FD	driving force
FS	sensing force
FC	Coriolis force
m	inertial mass
x	displacement into driving motion
y	displacement into sensing motion
c	damping coefficient
k	stiffness constant
$\mathsf{\Omega }$	external rotation rate
${\omega }_n$	natural frequency
$\zeta$	damping factor
F 0	initial force
$x_0$	initial displacement
$\varphi$	phase angle
$m_D$	driving mass
$k_D$	driving spring stiffness constant
$c_D$	driving damping constant
$m_C$	Coriolis mass
${\omega }_D$	driving frequency
$m_S$	sensing mass
$k_S$	sensing spring stiffness constant
$c_S$	sensing damping constant
SU-8	epoxy-based negative photoresist
UV LIGA	ultra violet lithography galvanoforming aboforming
FEA	finite element analysis