A	holder vibration amplitude, mm
I	isotropy, %
Isl	intensity of scattered light, a.u.
f	holder vibration frequency, Hz
n	rotational speed of the CDF machine disc, rpm
nh	rotational speed of the workpiece holder, rpm
t	machining time, min
Sa	arithmetic mean height, μm
Sdq	root mean square gradient of the surface, μm/μm
Sdr	developed interfacial area ratio, %
Sn	standard deviation of the angular distribution of scattered light intensity, a.u.
SPc	peak density, pks/mm2
Sp	maximum peak height, μm
Ssc	arithmetic mean summit curvature, 1/μm
Sx(0)	initial value of the selected parameter of the surface roughness
Sx(t)	final value of the selected parameter of the surface roughness
ΔSx	the relative difference values of the selected parameter, %
φ	angle of scattered light, a.u.