Table 2. Key Deposition Parameters for the Fabrication of Porous Polymer Films Using D4 as Porogen.
P/Psat |
|||||
---|---|---|---|---|---|
sample ID | EGDA | GMA | D4 | D4/GMA | Tsub (°C) |
SP-D1 | 0 | 0.13 | 0.2 | 1.8 | 18 |
SP-D2 | 0 | 0.16 | 0.3 | 1.8 | 12.8 |
SP-D3 | 0 | 0.27 | 0.5 | 1.7 | 8.6 |
SP-D4 | 0.1 | 0.27 | 0.4 | 1.7 | 8.6 |